Selective detection of phosgene by nanocrystalline diamond layer

Nanocrystalline diamond (NCD) films were grown on gold/Al2O3 substrate using microwave plasma‐enhanced chemical vapor deposition (PECVD) process. The NCD morphology was controlled by the deposition time and it was investigated by scanning electron microscopy (SEM). Gas sensing properties of NCD surf...

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Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2009-09, Vol.206 (9), p.2070-2073
Hauptverfasser:	Davydova, Marina, Kromka, Alexander, Exnar, Petr, Stuchlik, Martin, Hruska, Karel, Vanecek, Milan, Kalbac, Martin
Format:	Artikel
Sprache:	eng
Schlagworte:	07.07.Df 68.55.A 68.65.−k 73.63.Bd 81.05.Uw 81.15.Gh Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science rheology Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials science Methods of deposition of films and coatings film growth and epitaxy Nanocrystalline materials Nanoscale materials and structures: fabrication and characterization Physics Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing
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Zusammenfassung:	Nanocrystalline diamond (NCD) films were grown on gold/Al2O3 substrate using microwave plasma‐enhanced chemical vapor deposition (PECVD) process. The NCD morphology was controlled by the deposition time and it was investigated by scanning electron microscopy (SEM). Gas sensing properties of NCD surface conductivity to humid air, CO2, NH3, and COCl2 gases were measured by impedance measurements at room and at high temperature (140 °C). The H‐terminated NCD surface shows a significant response to oxidizing gas (humid air, COCl2) in comparison to reducing gases (CO2, NH3).
ISSN:	1862-6300 1862-6319
DOI:	10.1002/pssa.200982216