Measurements on MIS structures at infrasonic frequencies
The capacitance and conductance of AlSiO2Si structures have been measured at frequencies as low as 0.03 Hz. Such measurements are an important supplement to generally accepted measurements at audio and high frequencies. It has been found that the frequency range from 1 to 0.1 Hz corresponds to equ...
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Veröffentlicht in: | Physica status solidi. A, Applied research Applied research, 1970-07, Vol.2 (3), p.627-634 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The capacitance and conductance of AlSiO2Si structures have been measured at frequencies as low as 0.03 Hz. Such measurements are an important supplement to generally accepted measurements at audio and high frequencies. It has been found that the frequency range from 1 to 0.1 Hz corresponds to equilibrium recharging of capacitances. From the equilibrium C–U curve and the high‐frequency C–U curve the distribution of impurities doped in Si near the SiSiO2 interface has been found.
[Russian Text Ignored]. |
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ISSN: | 0031-8965 1521-396X |
DOI: | 10.1002/pssa.19700020324 |