Micromachined electrochemical flow cell for biosensing

A miniaturized electrochemical flow cell was fabricated on a silicon substrate using micromachining techniques, including photolithography, vacuum deposition, anisotropic etching, and fusion bonding. The flow cell consisted of a glass plate with gold elearodes, a silicon chip with a V‐shaped groove, and immobilized glucose oxidase. Hydrogen peroxide and glucose were measured by direct‐batch injection and by using the device in flow‐injection analysis (FIA) system.