Organic–Inorganic Thin Films from TiCl 4 and 4‐Aminophenol Precursors: A Model Case of ALD/MLD Hybrid‐Material Growth?
Invited for the cover of this issue are Pia Sundberg and Maarit Karppinen from the Aalto University, Finland. The cover image shows the deposition cycle of a (Ti–O–C 6 H 4 –N=) n ‐type thin film grown by a combined atomic and molecular layer deposition (ALD/MLD) technique with TiCl 4 and 4‐aminophen...
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Veröffentlicht in: | European journal of inorganic chemistry 2014-02, Vol.2014 (6), p.950-950 |
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container_title | European journal of inorganic chemistry |
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creator | Sundberg, Pia Karppinen, Maarit |
description | Invited for the cover of this issue are Pia Sundberg and Maarit Karppinen from the Aalto University, Finland. The cover image shows the deposition cycle of a (Ti–O–C
6
H
4
–N=)
n
‐type thin film grown by a combined atomic and molecular layer deposition (ALD/MLD) technique with TiCl
4
and 4‐aminophenol as precursors. |
doi_str_mv | 10.1002/ejic.201400081 |
format | Article |
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6
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ispartof | European journal of inorganic chemistry, 2014-02, Vol.2014 (6), p.950-950 |
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language | eng |
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title | Organic–Inorganic Thin Films from TiCl 4 and 4‐Aminophenol Precursors: A Model Case of ALD/MLD Hybrid‐Material Growth? |
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