Investigation of Optical, Electrical, and Mechanical Properties of MOCVD‐grown ZrO 2 Films

Investigation of Optical, Electrical, and Mechanical Properties of MOCVD‐grown ZrO 2 Films

Full Paper: ZrO 2 thin films are deposited by metal‐organic (MO)CVD using the precursor (Zr(NMe 2 ) 2 (guan) 2 ) as the Zr source, together with oxygen. Functional properties, including the optical, electrical, and mechanical properties, of the resulting ZrO 2 films are investigated.

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Veröffentlicht in:Chemical vapor deposition 2014-09, Vol.20 (7-8-9), p.320-327
Hauptverfasser: Dang, Van‐Son, Banerjee, Manish, Zhu, Huaizhi, Srinivasan, Nagendra Babu, Parala, Harish, Pfetzing‐Micklich, Janine, Wieck, Andreas D., Devi, Anjana
Format: Artikel
Sprache:eng
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Zusammenfassung:Full Paper: ZrO 2 thin films are deposited by metal‐organic (MO)CVD using the precursor (Zr(NMe 2 ) 2 (guan) 2 ) as the Zr source, together with oxygen. Functional properties, including the optical, electrical, and mechanical properties, of the resulting ZrO 2 films are investigated.
ISSN:0948-1907
1521-3862
DOI:10.1002/cvde.201407124