Thermal and Mechanical Properties of Silicon Tetrachloride (SiCl4) and Germanium Tetrachloride (GeCl4) in Their Vapor and Liquid Phases

Thermal and Mechanical Properties of Silicon Tetrachloride (SiCl4) and Germanium Tetrachloride (GeCl4) in Their Vapor and Liquid Phases

The most‐common physical properties of the precursor species SiCl4 and GeCl4 in their vapor and liquid phases are compiled from several sources in the literature. General expressions over a large range of temperature are proposed either by the use of referenced expressions or by the use of suitable...

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Veröffentlicht in:Chemical vapor deposition 2007-05, Vol.13 (5), p.199-203
Hauptverfasser: Prat, O. P., Cloitre, T., Aulombard, R.-L.
Format: Artikel
Sprache:eng
Schlagworte:
Germanium tetrachloride
Semiconductors
Silicon tetrachloride
Structure-property relationships
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Zusammenfassung:The most‐common physical properties of the precursor species SiCl4 and GeCl4 in their vapor and liquid phases are compiled from several sources in the literature. General expressions over a large range of temperature are proposed either by the use of referenced expressions or by the use of suitable empirical models.
ISSN:0948-1907
1521-3862
DOI:10.1002/cvde.200604242