Liquid‐delivery MOCVD of La 1− x Sr x MnO 3−δ thin films

Communication: The properties of perovskite materials make them suitable for many applications. Recently the perovskite La 1−x M x Mno 3−δ , where M = Ca, Sr, or Ba, has attracted much attention because of its colossal magnetoresistance. Previous attempts to deposit thin films by PVD or MOCVD have required films to be post‐annealed to obtain good transport properties. This paper shows that by increasing the oxygen partial pressure during deposition good quality layers can be grown without any post‐annealing.