Humidity Sensing Properties of the Sensor Based on V‐doped Nanoporous Ti 0.9 Sn 0.1 O 2 Thin Film

Vanadium doped nanoporous Ti 0.9 Sn 0.1 O 2 thin film has been prepared on an alumina substrate by sol‐gel method with Pluronic P123 as the organic template, and humidity sensing properties of it has been investigated. It is found that V‐doped nanoporous Ti 0.9 Sn 0.1 O 2 thin film shows good humidity sensing properties, and impendence of it decreases more than four orders of magnitude in the relative humidity (RH) range of 11%–95% at 25°C. The response and recovery time of this sensor are about 13 and 17 s, respectively. High sensitivity, narrow hysteresis loop, rapid response and recovery, prominent stability and good repeatability are obtained. A possible mechanism is suggested to explain the humidity sensitive properties.