Permeation of simple gases through plasma polymerized films from fluorine-containing monomers

The permeation of several different permanent gases through plasma polymer membranes was studied. The plasma polymers were produced by a microwave discharge of various fluorine‐containing monomers. Plasma polymers made from fluorine‐rich monomers (F/C ≈ 1) yield films with the highest selectivities; those made from low fluorine content monomers show very little selectivity among the various gases. CO2 solubility is very high in the fluorine‐rich plasma polymers and gives rise to large CO2 to CH2 selectivities. © 1995 John Wiley & Sons, Inc.