Modification of polyimide coatings by high energy ion bombardment

Exposure of 25‐μm films of polyimide and polyamideimide to high doses (> 1015/cm2) of energetic ions (energy ≥ 100 keV) resulted in physical and chemical modification of the film surface. Cross‐section microscopy revealed damaged layers extending beyond the projected ion range; conductivity in th...

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Veröffentlicht in:Journal of applied polymer science 1988-06, Vol.35 (8), p.2183-2191
Hauptverfasser: Zussman, M. P., Wood, S., Scala, L. C., Bartko, J., Vincenz, A.
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Sprache:eng
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Zusammenfassung:Exposure of 25‐μm films of polyimide and polyamideimide to high doses (> 1015/cm2) of energetic ions (energy ≥ 100 keV) resulted in physical and chemical modification of the film surface. Cross‐section microscopy revealed damaged layers extending beyond the projected ion range; conductivity in this damaged layer was found to be as high as 103ω−1 cm−1. Surface conductivity was found to be a function of ion energy and dose, with an exponential energy dependence from 200 to 900 keV. The temperature dependence and thermal stability of the surface conductivity were determined.
ISSN:0021-8995
1097-4628
DOI:10.1002/app.1988.070350818