RF sputter deposition of poly(tetrafluoroethylene) films as masking materials for silicon micromachining

Polymers have been studied extensively because of their wonderful array of properties. Their properties can be tailored by many means and can be made useful in many ways. Polymers can be crosslinked or branched and can provide different properties, such as conduction and passivation. This study deal...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of applied polymer science 2004-01, Vol.91 (2), p.1183-1192
Hauptverfasser:	Bodas, Dhananjay S., Patil, Sheetal J., Mandale, A. B., Gangal, S. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Exact sciences and technology FT-IR Physicochemistry of polymers Polymer industry, paints, wood structure Technology of polymers X-ray
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!