Synergetic thermodynamic/kinetic separation of C 3 H 8 / CH 3 F on carbon adsorbents for ultrapure fluoromethane electronic gas
Atomic layer etching (ALE) using the environmentally friendly electronic gas fluoromethane (CH 3 F) is guided for fabricating nanoscale electronic components. The adsorptive purification of CH 3 F provide a viable direction to remove trace amounts of impurities to produce highly pure CH 3 F (>99....
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| Veröffentlicht in: | AIChE journal 2023-05, Vol.69 (5) |
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| creator | Huang, Jiawu Peng, Junjie Wei, Xuan Du, Shengjun Yang, Cuiting Xiao, Jing |
| description | Atomic layer etching (ALE) using the environmentally friendly electronic gas fluoromethane (CH
3
F) is guided for fabricating nanoscale electronic components. The adsorptive purification of CH
3
F provide a viable direction to remove trace amounts of impurities to produce highly pure CH
3
F (>99.9999%) for the ALE process. Herein, to remove trace propane (~100 ppm) in CH
3
F, we report synergetic thermodynamic and kinetic separation of C
3
H
8
/CH
3
F over glucose‐derived carbon molecular sieve CMS‐T, (T as pyrolysis temperature). With pore size slightly larger than the kinetic diameter of C
3
H
8
, CMS‐600 allows both strong confined adsorption of C
3
H
8
and a higher diffusion rate of C
3
H
8
over CH
3
F, resulting in a remarkable separation factor of 51.1. Breakthrough experiment demonstrates a high dynamic production capacity of 457 L kg
−1
of 7 N CH
3
F ( |
| doi_str_mv | 10.1002/aic.18027 |
| format | Article |
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3
F) is guided for fabricating nanoscale electronic components. The adsorptive purification of CH
3
F provide a viable direction to remove trace amounts of impurities to produce highly pure CH
3
F (>99.9999%) for the ALE process. Herein, to remove trace propane (~100 ppm) in CH
3
F, we report synergetic thermodynamic and kinetic separation of C
3
H
8
/CH
3
F over glucose‐derived carbon molecular sieve CMS‐T, (T as pyrolysis temperature). With pore size slightly larger than the kinetic diameter of C
3
H
8
, CMS‐600 allows both strong confined adsorption of C
3
H
8
and a higher diffusion rate of C
3
H
8
over CH
3
F, resulting in a remarkable separation factor of 51.1. Breakthrough experiment demonstrates a high dynamic production capacity of 457 L kg
−1
of 7 N CH
3
F (<100 ppb of C
3
H
8
) over CMS‐600 with excellent cycling stability. Adsorption purification over carbon provides a feasible approach for industrial hyperpurification of electronic gas.</description><identifier>ISSN: 0001-1541</identifier><identifier>EISSN: 1547-5905</identifier><identifier>DOI: 10.1002/aic.18027</identifier><language>eng</language><ispartof>AIChE journal, 2023-05, Vol.69 (5)</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c747-83da16076cd470a87c54216e2465cdea4e7bebceba7bbd3ec612741e913d73273</citedby><cites>FETCH-LOGICAL-c747-83da16076cd470a87c54216e2465cdea4e7bebceba7bbd3ec612741e913d73273</cites><orcidid>0000-0001-5312-2309 ; 0000-0002-7006-6211</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Huang, Jiawu</creatorcontrib><creatorcontrib>Peng, Junjie</creatorcontrib><creatorcontrib>Wei, Xuan</creatorcontrib><creatorcontrib>Du, Shengjun</creatorcontrib><creatorcontrib>Yang, Cuiting</creatorcontrib><creatorcontrib>Xiao, Jing</creatorcontrib><title>Synergetic thermodynamic/kinetic separation of C 3 H 8 / CH 3 F on carbon adsorbents for ultrapure fluoromethane electronic gas</title><title>AIChE journal</title><description>Atomic layer etching (ALE) using the environmentally friendly electronic gas fluoromethane (CH
3
F) is guided for fabricating nanoscale electronic components. The adsorptive purification of CH
3
F provide a viable direction to remove trace amounts of impurities to produce highly pure CH
3
F (>99.9999%) for the ALE process. Herein, to remove trace propane (~100 ppm) in CH
3
F, we report synergetic thermodynamic and kinetic separation of C
3
H
8
/CH
3
F over glucose‐derived carbon molecular sieve CMS‐T, (T as pyrolysis temperature). With pore size slightly larger than the kinetic diameter of C
3
H
8
, CMS‐600 allows both strong confined adsorption of C
3
H
8
and a higher diffusion rate of C
3
H
8
over CH
3
F, resulting in a remarkable separation factor of 51.1. Breakthrough experiment demonstrates a high dynamic production capacity of 457 L kg
−1
of 7 N CH
3
F (<100 ppb of C
3
H
8
) over CMS‐600 with excellent cycling stability. Adsorption purification over carbon provides a feasible approach for industrial hyperpurification of electronic gas.</description><issn>0001-1541</issn><issn>1547-5905</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><recordid>eNotkD1PwzAURS0EEqUw8A-8MqT1RxKnI4ooRarEQPfo2X5pA4ld2e7Qib-OKUz3vTNc6R5CHjlbcMbEEgaz4A0T6orMeFWqolqx6prMGGO8yIDfkrsYP_MnVCNm5Pvj7DDsMQ2GpgOGyduzg2kwy6_BXWjEIwRIg3fU97Slkm5oQ5e03eRzTTM2EHQOsNEHjS5F2vtAT2MKcDwFpP148sFPmA7gkOKIJgXvcvUe4j256WGM-PCfc7Jbv-zaTbF9f31rn7eFUXlEIy3wmqna2FIxaJSpSsFrFGVdGYtQotKoDWpQWluJps7zSo4rLq2SQsk5efqrNcHHGLDvjmGYIJw7zrpfcV0W113EyR_ySmHW</recordid><startdate>202305</startdate><enddate>202305</enddate><creator>Huang, Jiawu</creator><creator>Peng, Junjie</creator><creator>Wei, Xuan</creator><creator>Du, Shengjun</creator><creator>Yang, Cuiting</creator><creator>Xiao, Jing</creator><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0001-5312-2309</orcidid><orcidid>https://orcid.org/0000-0002-7006-6211</orcidid></search><sort><creationdate>202305</creationdate><title>Synergetic thermodynamic/kinetic separation of C 3 H 8 / CH 3 F on carbon adsorbents for ultrapure fluoromethane electronic gas</title><author>Huang, Jiawu ; Peng, Junjie ; Wei, Xuan ; Du, Shengjun ; Yang, Cuiting ; Xiao, Jing</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c747-83da16076cd470a87c54216e2465cdea4e7bebceba7bbd3ec612741e913d73273</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Huang, Jiawu</creatorcontrib><creatorcontrib>Peng, Junjie</creatorcontrib><creatorcontrib>Wei, Xuan</creatorcontrib><creatorcontrib>Du, Shengjun</creatorcontrib><creatorcontrib>Yang, Cuiting</creatorcontrib><creatorcontrib>Xiao, Jing</creatorcontrib><collection>CrossRef</collection><jtitle>AIChE journal</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Huang, Jiawu</au><au>Peng, Junjie</au><au>Wei, Xuan</au><au>Du, Shengjun</au><au>Yang, Cuiting</au><au>Xiao, Jing</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Synergetic thermodynamic/kinetic separation of C 3 H 8 / CH 3 F on carbon adsorbents for ultrapure fluoromethane electronic gas</atitle><jtitle>AIChE journal</jtitle><date>2023-05</date><risdate>2023</risdate><volume>69</volume><issue>5</issue><issn>0001-1541</issn><eissn>1547-5905</eissn><abstract>Atomic layer etching (ALE) using the environmentally friendly electronic gas fluoromethane (CH
3
F) is guided for fabricating nanoscale electronic components. The adsorptive purification of CH
3
F provide a viable direction to remove trace amounts of impurities to produce highly pure CH
3
F (>99.9999%) for the ALE process. Herein, to remove trace propane (~100 ppm) in CH
3
F, we report synergetic thermodynamic and kinetic separation of C
3
H
8
/CH
3
F over glucose‐derived carbon molecular sieve CMS‐T, (T as pyrolysis temperature). With pore size slightly larger than the kinetic diameter of C
3
H
8
, CMS‐600 allows both strong confined adsorption of C
3
H
8
and a higher diffusion rate of C
3
H
8
over CH
3
F, resulting in a remarkable separation factor of 51.1. Breakthrough experiment demonstrates a high dynamic production capacity of 457 L kg
−1
of 7 N CH
3
F (<100 ppb of C
3
H
8
) over CMS‐600 with excellent cycling stability. Adsorption purification over carbon provides a feasible approach for industrial hyperpurification of electronic gas.</abstract><doi>10.1002/aic.18027</doi><orcidid>https://orcid.org/0000-0001-5312-2309</orcidid><orcidid>https://orcid.org/0000-0002-7006-6211</orcidid></addata></record> |
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| language | eng |
| recordid | cdi_crossref_primary_10_1002_aic_18027 |
| source | Wiley Online Library Journals Frontfile Complete |
| title | Synergetic thermodynamic/kinetic separation of C 3 H 8 / CH 3 F on carbon adsorbents for ultrapure fluoromethane electronic gas |
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