Scanning Probe Direct-Write of Germanium Nanostructures

Atomic force direct‐write of carbon‐free germanium nanostructures is easily accomplished via high‐field reaction of liquid diphenylgermane precursor. Sub‐30 nm features are written in arbitrary patterns at velocities as high as 100 μm s−1.

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Veröffentlicht in:Advanced Materials, 22(41):4639–4642 22(41):4639–4642, 2010-11, Vol.22 (41), p.4639-4642
Hauptverfasser: Torrey, Jessica D., Vasko, Stephanie E., Kapetanovic, Adnan, Zhu, Zihua, Scholl, Andreas, Rolandi, Marco
Format: Artikel
Sprache:eng
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Zusammenfassung:Atomic force direct‐write of carbon‐free germanium nanostructures is easily accomplished via high‐field reaction of liquid diphenylgermane precursor. Sub‐30 nm features are written in arbitrary patterns at velocities as high as 100 μm s−1.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.201001987