Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors

High‐carbin mcirostructures as components in microelectromechanical structures and microreactors are of particular interest because their mechanical, electrical, and chemical properties can be controlled by the temperature of preparation. The range of electrical properties is especially impressive. A method of fabricating microstructures of glassy carbon and other high‐carbon solids is presented, based on micromolding of polymers to form precursors to these structures and pyrolysis to yield the carbon solids. The advantages of the technique are discussed.