AFM studies of the initial stages of spin-coated prepolymer film growth on silicon wafers

Polymeric film growth on inorganic substrates plays an important role in the technology of sensors and microelectronics. A study of the film growth of a prepolymer of the dicyanate of bisphenol A (DCBA) spin‐coated onto silicon substrates is presented in which layer‐by‐layer growth is demonstrated....

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Veröffentlicht in:Advanced materials (Weinheim) 1996-10, Vol.8 (10), p.829-833
Hauptverfasser: Gesang, Thomas, Höper, Ralf, Possart, Wulf, Petermann, Jürgen, Hennemann, Otto-Diedrich
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Sprache:eng
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Zusammenfassung:Polymeric film growth on inorganic substrates plays an important role in the technology of sensors and microelectronics. A study of the film growth of a prepolymer of the dicyanate of bisphenol A (DCBA) spin‐coated onto silicon substrates is presented in which layer‐by‐layer growth is demonstrated. This mode of growth is thought to be related to an enrichment of the trimer (see Figure) including a triazine ring.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.19960081014