Microfabrication by microcontact printing of self-assembled monolayers

Microfabrication by microcontact printing of self-assembled monolayers

Microcontact printing, is described. It offers extreme experimental simplicity and flexibility, relying on the ability of self‐assembled monolayers (SAMs) of longchain alkanethiolates on gold and other metals to act as nanometer resists. The Figure is an electron micrograph of a silicon microstructu...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Weinheim) 1994-07, Vol.6 (7-8), p.600-604
Hauptverfasser: Wilbur, James L., Kumar, Amit, Kim, Enoch, Whitesides, George M.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Microcontact printing, is described. It offers extreme experimental simplicity and flexibility, relying on the ability of self‐assembled monolayers (SAMs) of longchain alkanethiolates on gold and other metals to act as nanometer resists. The Figure is an electron micrograph of a silicon microstructure resulting from chemical etching of a patterned SAM.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.19940060719