(Invited) Si-Based Micro-Nanomechanics for Ultimate Sensing

(Invited) Si-Based Micro-Nanomechanics for Ultimate Sensing

Resonant sensors for ultimate sensing are developed. By scaling down, the sensitivity of a magnetic resonance force microscopy probe is improved, and three-dimensional imaging of radical density in a poly-10-(4-vinylbenzyl)-10H-phenothiazine particle is demonstrated at room temperature. Also resonan...

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Veröffentlicht in:ECS transactions 2015-03, Vol.66 (5), p.123-129, Article 123
Hauptverfasser: Ono, Takahito, Toda, Masaya, Seo, Yong-Jun, Inomata, Naoki
Format: Artikel
Sprache:eng
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Zusammenfassung:Resonant sensors for ultimate sensing are developed. By scaling down, the sensitivity of a magnetic resonance force microscopy probe is improved, and three-dimensional imaging of radical density in a poly-10-(4-vinylbenzyl)-10H-phenothiazine particle is demonstrated at room temperature. Also resonant thermal sensor with a microchannel is developed and applied to detect heat from a single brawn fat cell.
ISSN:1938-5862
1938-6737
DOI:10.1149/06605.0123ecst