A Piezoelectric Friction-Inertial Linear Motor Based on Piezoelectric Single-Crystal Cymbal Displacement Amplification Mechanism

Piezoelectric friction-inertial motor is known for its promise for a long-range and high-resolution motion.The movement of the slider/rotor of the motor is achieved by stick-slip effect.We report a relaxor-based-ferroelectric-single-crystal cymbal actuator and a miniature piezoelectric friction-inertial linear motor（abbreviated as PFILM）fabricated with the cymbal actuator.The cymbal actuator is fabricated with a 10 mm diameter disk of 0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 single crystal.The displacement of the cymbal actuator increases almost proportionally from 0to 23μm with driving voltage up to 500 V,and the minimal hysteresis is observed.The cymbalPFILM with 20 mm motion range works under driving voltage frequency of ca.100 Hz to ca.5kHz,the fastest speed is obtained with 3.5kHz and the no-load speed is 14mm/s and the maximum thrust force is 98 mN.Compared with a PFILM based on multilayer piezoelectric ceramic,the proposed motor has a larger stroke under DC/quasistatic input voltage in fine motion mode,but a smaller driving force in long-travel mode due to lower resonance frequency.