Novel high- with low specific on-resistance high voltage lateral double-diffused MOSFET

A novel voltage-withstand substrate with high-K（HK, k 〉 3.9, k is the relative permittivity） dielectric and low specific on-resistance（Ron,sp） bulk-silicon, high-voltage LDMOS（HKLR LDMOS）is proposed in this paper. The high-K dielectric and highly doped interface N＋-layer are made in bulk silicon to reduce the surface field drift region. The high-K dielectric can fully assist in depleting the drift region to increase the drift doping concentration（Nd） and reshape the electric field distribution. The highly doped N＋-layer under the high-K dielectric acts as a low resistance path to reduce the Ron,sp. The new device with the high breakdown voltage（BV）, the low Ron,sp, and the excellent figure of merit（FOM = BV~2/Ron,sp） is obtained. The BV of HKLR LDMOS is 534 V, Ron,sp is 70.6 m？·cm~2, and FOM is 4.039 MW·cm~（-2）.