磁控溅射W/DLC/W-S-C复合膜的制备及其性能

磁控溅射W/DLC/W-S-C复合膜的制备及其性能

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Veröffentlicht in:中国有色金属学报：英文版 2015, Vol.25 (9), p.3002-3011
1. Verfasser: 代明江 韦春贝 周克崧 朱敏 侯惠君 林松盛 佟鑫
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Sprache:eng
Schlagworte:
W/DLC/W-S-C复合膜
摩擦因数
磁控溅射
结合强度
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source Access via ScienceDirect (Elsevier); Alma/SFX Local Collection
subjects W/DLC/W-S-C复合膜
摩擦因数
磁控溅射
结合强度
title 磁控溅射W/DLC/W-S-C复合膜的制备及其性能
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