A novel diode string triggered gated-Pi N junction device for electrostatic discharge protection in 65-nm CMOS technology

A novel diode string-triggered gated-Pi N junction device, which is fabricated in a standard 65-nm complementary metal-oxide semiconductor(CMOS) technology, is proposed in this paper. An embedded gated-Pi N junction structure is employed to reduce the diode string leakage current to 13 n A/μm in a t...

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Veröffentlicht in:中国物理B:英文版 2015 (10), p.594-598
1. Verfasser: 张立忠 王源 陆光易 曹健 张兴
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Sprache:eng
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Zusammenfassung:A novel diode string-triggered gated-Pi N junction device, which is fabricated in a standard 65-nm complementary metal-oxide semiconductor(CMOS) technology, is proposed in this paper. An embedded gated-Pi N junction structure is employed to reduce the diode string leakage current to 13 n A/μm in a temperature range from 25°C to 85°C. To provide the effective electrostatic discharge(ESD) protection in multi-voltage power supply, the triggering voltage of the novel device can be adjusted through redistributing parasitic resistance instead of changing the stacked diode number.
ISSN:1674-1056
2058-3834