Ar＋/Ar, O2＋/O2 and N2＋/N2 Elastic Momentum Collision Cross Sections： Calculation and Validation Using the Semi-Classical Model

The aim of this paper is to obtain relevant sets of collision cross sections of the parent ions in low pressure discharges in argon, oxygen, and nitrogen, i.e., Ar＋ in Ar, O2＋ in O2 and N2＋ in N2. These ion data are first discussed and then validated from comparisons between the calculated transport coefficients and those measured in the literature. The elastic momentum transfer collision cross sections are determined from a semi-classical approximation for the phase shift calculation based on a 12-6-4 inter-particle potential while ion transport coefficients are determined versus the reduced electric field from Monte Carlo simulations.