A surface-potential-based model for A1GaN/AIN/GaN HEMT

A new surface-potential-based model for A1GaN/A1N/GaN high electron mobility transistor （HEMT） is proposed in this paper. Since the high polarization effects caused by AlN interlayer favorably influence the two dimensional electron gas （2DEG） and scattering mechanisms, we first add spontaneous and piezoelectric charge terms to the source equation of surface-potential, and a mobility model for A1GaN/A1N/GaN HEMT is rewritten. Compared with TCAD simulations, the DC characteristics of A1GaN/AIN/GaN HEMT are faithfully reproduced by the new model.