Statistical distribution based detector response function ofSi （PIN） detector for Kα and Kβ X-ray

A semi-empirical detector response function （DRF） model of Si （PIN） detector is proposed to fit element Kα and Kβ X-ray spectra, which is based on statistical distribution analytic （SDA） method. The model for each single peak contains a step function, a Gaussian function and an exponential tail function. Parameters in the model are obtained by weighted nonlinear least-squares fitting method. In the application, six kinds of elements＇ characteristic X-ray spectra are obtained by Si （PIN） detector, and fitted out by the established DRF model. Reduced chi-square values are at the interval of 1.11-1.25. Other applications of the method are also discussed.