Micro-arc oxidization fabrication and ethanol sensing performance of Fe-doped Ti02 thin films

In-situ pure TiO2 and Fe-doped TiO2 thin films were synthesized on Ti plates via the micro-arc oxidation （MAO） technique. The as-fabricated anatase TiO2 thin film-based conductometric sensors were employed to measure the gas sensitivity to ethanol. The results showed that Fe ions could be easily introduced into the MAO-TiO2 thin films by adding precursor K4（FeCN）6＇3H20 into the NaaPO4 electrolyte. The amount of doped Fe ions increased almost linearly with the concentration of Kg（FeCN）63H20 increasing, eventually affecting the ethanol sensing performances of TiO2 thin films. It was found that the enhanced sensor signals obtained had an optimal concentration of Fe dopant （1.28at%）, by which the maximal gas sensor signal to 1000 ppm ethanol was estimated to be 7.91 at 275℃. The response time was generally reduced by doped Fe ions, which could be ascribed to the increase of oxygen vacancies caused by Fe3＋ substituting for Ti4＋.