MOLECULAR BEAM STUDIES ON DYNAMICS OF LASER-INDUCED CHEMICAL REACTIONS OF GaAs AND InP SURFACES WITH CHLORINE

The dynamics of laser-induced chemical reactions of GaAs (100) and InP(100) surfaces with chlorine molecules under UV and visible (355 nm and 560 nm) irradiation are studied using a CW supersonic molecular beam and time-resolved mass spectrometry. The major reaction products observed in time-resolve...

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Veröffentlicht in:中国科学:数学英文版 1990 (5), p.607-616
1. Verfasser: 秦启宗 李雨林 金忠(告羽) 章壮健 杨永炎 蔡中厚 刘先年 戴自国 郏伟杰 郑企克
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Sprache:eng
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Zusammenfassung:The dynamics of laser-induced chemical reactions of GaAs (100) and InP(100) surfaces with chlorine molecules under UV and visible (355 nm and 560 nm) irradiation are studied using a CW supersonic molecular beam and time-resolved mass spectrometry. The major reaction products observed in time-resolved mass spectrometric measurements are GaC1, and InCl, (x=1, 2). The dependence of time-of-flight spectra of the desorbed products on laser wavelength and fluence has been investigated. Furthermore, the obvious enhancement of laser-induced gas-surface reactions by increasing the translational energy of incident chlorine molecules is reported for the first time.
ISSN:1674-7283
1869-1862