MOLECULAR BEAM STUDIES ON DYNAMICS OF LASER-INDUCED CHEMICAL REACTIONS OF GaAs AND InP SURFACES WITH CHLORINE
The dynamics of laser-induced chemical reactions of GaAs (100) and InP(100) surfaces with chlorine molecules under UV and visible (355 nm and 560 nm) irradiation are studied using a CW supersonic molecular beam and time-resolved mass spectrometry. The major reaction products observed in time-resolve...
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Veröffentlicht in: | 中国科学:数学英文版 1990 (5), p.607-616 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The dynamics of laser-induced chemical reactions of GaAs (100) and InP(100) surfaces with chlorine molecules under UV and visible (355 nm and 560 nm) irradiation are studied using a CW supersonic molecular beam and time-resolved mass spectrometry. The major reaction products observed in time-resolved mass spectrometric measurements are GaC1, and InCl, (x=1, 2). The dependence of time-of-flight spectra of the desorbed products on laser wavelength and fluence has been investigated. Furthermore, the obvious enhancement of laser-induced gas-surface reactions by increasing the translational energy of incident chlorine molecules is reported for the first time. |
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ISSN: | 1674-7283 1869-1862 |