Pulsed excimer laser deposition and characterization of ferroelectric lead-zirconate-titanate thin films
The rapid development of ultralarge-scale integration demands integrated devices from ordinary 1-dimensional integrated devices to 3-dimensional devices and multi-function devices. Because of its non-volatility and radiation-hardness, very large (~1000) dielectric constant and polarizability, ferroe...
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Veröffentlicht in: | 中国科学通报:英文版 1995 (4), p.340-344 |
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Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The rapid development of ultralarge-scale integration demands integrated devices from ordinary 1-dimensional integrated devices to 3-dimensional devices and multi-function devices. Because of its non-volatility and radiation-hardness, very large (~1000) dielectric constant and polarizability, ferroelectric thin film and its application research have recently attracted great attention in newly functional materials and integrated devices such as |
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ISSN: | 2095-9273 |