Deep levels, transport and THz emission properties of SiGe/Si quantum-well structures
Recharging of quantum confinement levels in SiGe quantum wells (QW) was studied by charge deep-level transient spectroscopy (Q-DLTS) for Si/SiGe/Si structures with different Ge contents in the SiGe layer. A peak with activation energy varying in the range from 0 to 100 meV in different tempera-ture...
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Veröffentlicht in: | 中国科学:技术科学英文版 2009 (1), p.6-9 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Recharging of quantum confinement levels in SiGe quantum wells (QW) was studied by charge deep-level transient spectroscopy (Q-DLTS) for Si/SiGe/Si structures with different Ge contents in the SiGe layer. A peak with activation energy varying in the range from 0 to 100 meV in different tempera-ture intervals was observed in Q-DLTS spectra. Activation energies extracted from Q-DLTS measure-mens are in good agreement with energies of quantum confinement levels in the QW. |
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ISSN: | 1674-7321 1869-1900 |