DYNAMIC CHARACTERISTIC ANALYSIS OF PRECISE LONG STROKE LINEAR MOTOR WITH AIR-BEARING IN OPTICAL LITHOGRAPHY

Dynamic characteristic is presented by identifying the model and the dynamic parameters of a precise long stroke linear motor （PLSLM） with the air-bearing in optical lithography. The PLSLM is supported by air-bearing on the stator, and is driven by on-board two large linear motors in a cross-configuration. Firstly, a model of the PLSLM is established by finite element method （FEM）. Secondly, based on the model, the natural frequencies and model shapes are discusse＆ And the contribution of each active mode is evaluated by computing the modal participation factors （MPF）, which indicates the major vibration direction. Furthermore, by the experimental modal analysis, the experimental results are in agreement with simulation results, which it is sure that the FEM is reasonable. What＇s more, comparing with the effects on the frequency due to the air-bearing stiffness, the relations of the natural frequencies with the air-bearing stiffness are found. It is found that the frequency response curve is fluctuant with th