Optical readout uncooled infrared imaging detector using knife-edge filter operation

An optical readout uncooled infrared （IR） imaging detector of bimaterial cantilever array using knife-edge filter operation （KEFO） is demonstrated. The angle change of each cantilever in a focal plane array （FPA） can be simultaneously detected with a resolution of 10.5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metaUized legs is specially designed and modeled. A FPA with 160×160 pixels is fabricated and thermal images with noise equivalent temperature difference （NETD） of 400 mK are obtained by this imaging detector.