Light Scattering Characteristics of Some Metal Surfaces—A Smoothing Effect?

Angularly resolved light scattering measurements of several materials are discussed. Root mean square values of surface roughness, slope and total integrated scatter are calculated. Results are compared to measurements made using a noncontact, optical profilometer. Samples of polished and diamond turned Cu, Si, Mo and electroless Ni are examined. Some surfaces show a change in angular scatter characteristic upon deposition of films using ion beam and magnetron sputtering; scattering is changed to become more in the specular direction. In some cases, total integrated scatter is reduced up to a factor of four, and surface microroughness at high spatial frequencies is reduced by a factor of ten.