MEMS and Nanotechnology for Gas Sensors

Solid-state gas sensors based on semiconducting sensing materials represent a viable solution for an increasing number of applications, ranging from health care and safety to quality control in industrial processes. Enhancing the sensitivity of the sensor requires an elevated temperature with uniform temperature distribution throughout the sensing layer, which can be accomplished through the use of the MEMS micro-heater. This book covers the different fabrication procedures and sensor applications pertaining to gas sensors with respect to MEMS and nanotechnology..