A new cantilever beam-rigid-body MEMS gyroscope: mathematical model and linear dynamics
A new microbeam-rigid-body gyroscope is introduced and its static and dynamic behaviours are studied. The main structure includes a microbeam and an eccentric end-rigid-body influencing the dynamic and static characteristics of the sensor. The sensitivity of the device and the effect of system param...
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| Format: | Artikel |
| Sprache: | eng |
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| Zusammenfassung: | A new microbeam-rigid-body gyroscope is introduced and its static and dynamic
behaviours are studied. The main structure includes a microbeam and an
eccentric end-rigid-body influencing the dynamic and static characteristics of
the sensor. The sensitivity of the device and the effect of system parameters
on the microsystem's response are investigated. |
|---|---|
| DOI: | 10.48550/arxiv.1408.3762 |