Near-field spectroscopy of silicon dioxide thin films

We analyze the results of scanning near-field infrared spectroscopy performed on thin films of a-SiO2 on Si substrate. The measured near-field signal exhibits surface-phonon resonances whose strength has a strong thickness dependence in the range from 2 to 300 {nm}. These observations are compared w...

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Veröffentlicht in:arXiv.org 2011-10
Hauptverfasser: Zhang, Lingfeng M, Andreev, Gregory O, Fei, Zhe, McLeod, Alexander S, Dominguez, Gerardo, Thiemens, Mark, Basov, Dimitri N, Castro Neto, Antonio H, Fogler, Michael M
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Sprache:eng
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Zusammenfassung:We analyze the results of scanning near-field infrared spectroscopy performed on thin films of a-SiO2 on Si substrate. The measured near-field signal exhibits surface-phonon resonances whose strength has a strong thickness dependence in the range from 2 to 300 {nm}. These observations are compared with calculations in which the tip of the near-field infrared spectrometer is modeled either as a point dipole or an elongated spheroid. The latter model accounts for the antenna effect of the tip and gives a better agreement with the experiment. Possible applications of the near-field technique for depth profiling of layered nanostructures are discussed.
ISSN:2331-8422
DOI:10.48550/arxiv.1110.4927