$Structural, magnetic and mechanical properties of 5 $\mu$m thick SmCo films for use in Micro-Electro-Mechanical-Systems$

Structural, magnetic and mechanical properties of 5 $\mu$m thick SmCo films for use in Micro-Electro-Mechanical-Systems

Journal of Applied Physics 103 (2008) 043911 5$\mu$m thick SmCo films were deposited onto Si substrates using triode sputtering. A study of the influence of deposition temperature (Tdep

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Bibliographische Detailangaben
Hauptverfasser:	Walther, Arnaud, Khlopkov, Kirill, Gutfleisch, Oliver, Givord, Dominique, Dempsey, N. M
Format:	Artikel
Sprache:	eng
Schlagworte:	Physics - Materials Science
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Journal of Applied Physics 103 (2008) 043911 5$\mu$m thick SmCo films were deposited onto Si substrates using triode sputtering. A study of the influence of deposition temperature (Tdep
DOI:	10.48550/arxiv.0804.1992