Vibrations of elastic systems with applications to MEMS and NEMS von Magrab, Edward B.

DE-634
DE-1043
DE-Aug4
DE-573
DE-92
DE-859
DE-863
DE-862
Volltext

Micro and nano fabrication tools and processes von Gatzen, Hans-Heinrich 1943-

DE-B768
DE-634
DE-1043
DE-1046
DE-Aug4
DE-573
DE-92
DE-898
DE-859
DE-861
DE-863
DE-862
DE-706
Volltext
Inhaltsverzeichnis
Abstract

Carbon for micro and nano devices von Sharma, Swati

Inhaltsverzeichnis

Materials and failures in MEMS and NEMS

Resonant MEMS fundamentals, implementation and application

Inhaltstext
Inhaltsverzeichnis

Micro and nano fabrication tools and processes von Gatzen, Hans Heinrich, Saile, Volker, Leuthold, Juerg 1966-

Inhaltstext
Inhaltsverzeichnis

Carbon for micro and nano devices von Sharma, Swati

DE-573
DE-1043
DE-1046
DE-858
DE-Aug4
DE-859
DE-860
DE-739
URL des Erstveröffentlichers

Exploring the quantum regime of nanoelectromechanical systems von Walter, Stefan 1984-

kostenfrei
Volltext

Bio and nano packaging techniques for electron devices advances in electronic device packaging

DE-92
DE-703
Volltext

Bio and nano packaging techniques for electron devices advances in electronic device packaging

Volltext

Operating machines at the nanoscale effects of electron-electron interactions and strong system-bath coupling on the working principles of electronic nanomachines von Bruch, Anton 1988-

Resonant MEMS fundamentals, implementation and application

DE-861
DE-91
DE-473
URL des Erstveröffentlichers

Bio and nano packaging techniques for electron devices advances in electronic device packaging

Inhaltstext
Inhaltsverzeichnis

Micro and nano mechanical testing of materials and devices

Inhaltsverzeichnis

Electrochemical methods for the micro- and nanoscale theoretical essentials, instrumentation and methods for applications in MEMS and nanotechnology von Kieninger, Jochen

DE-1043
DE-1046
DE-858
DE-Aug4
DE-859
DE-860
DE-703
DE-739
URL des Erstveröffentlichers

Operating machines at the nanoscale effects of electron-electron interactions and strong system-bath coupling on the working principles of electronic nanomachines von Bruch, Anton 1988-

kostenfrei

Resonant MEMS Fundamentals, Implementation, and Application von Fedder, Gary K.

Nanoelectromechanical Systems von Duraffourg, Laurent

DE-Aug4
DE-573
DE-92
DE-861
DE-473
URL des Erstveröffentlichers

Materials and failures in MEMS and NEMS

DE-92
DE-861
DE-473
URL des Erstveröffentlichers

Materials and failures in MEMS and NEMS