Thin film materials technology sputtering of compound materials

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Wasa, Kiyotaka
Weitere Verfasser:	Adachi, Hideaki, Kitabatake, Makoto
Format:	E-Book
Sprache:	English
Veröffentlicht:	Norwich, NY William Andrew Pub. ©2004
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!