Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium
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| Format: | Elektronisch Tagungsbericht E-Book |
| Sprache: | English |
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Baech, Switzerland
Trans Tech Publications Ltd.
[2021]
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| Schriftenreihe: | Solid state phenomena
Volume 314 |
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| Online-Zugang: | TUM01 |
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| series | Solid state phenomena |
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| spellingShingle | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Solid state phenomena |
| subject_GND | (DE-588)1071861417 |
| title | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| title_alt | UCPSS |
| title_auth | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| title_exact_search | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| title_exact_search_txtP | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| title_full | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Edited by Paul W. Mertens, Kurt Wostyn, Marc Meuris and Marc Heyns |
| title_fullStr | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Edited by Paul W. Mertens, Kurt Wostyn, Marc Meuris and Marc Heyns |
| title_full_unstemmed | Ultra clean processing of semiconductor surfaces XV selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium Edited by Paul W. Mertens, Kurt Wostyn, Marc Meuris and Marc Heyns |
| title_short | Ultra clean processing of semiconductor surfaces XV |
| title_sort | ultra clean processing of semiconductor surfaces xv selected peer reviewed papers from the 15th international symposium on ultra clean processing of semiconductor surfaces ucpss april 12 15 2021 mechelen belgium |
| title_sub | selected, peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV013789715 |
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