Thin film materials technology sputtering of compound materials
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Norwich, NY Heidelberg
William Andrew Pub. Springer
© 2004
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| Online-Zugang: | FLA01 URL des Erstveröffentlichers |
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| Zusammenfassung: | An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering |
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| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (xiv, 518 pages) illustrations |
| ISBN: | 0815514832 9780815514831 9783540211181 3540211187 9780815519317 0815519311 1282027662 9781282027664 |