Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators

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Bibliographische Detailangaben
1. Verfasser: Campanella, Humberto (VerfasserIn)
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: Norwood, MA. Artech House 2010
Schriftenreihe:Artech House integrated microsystems series
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MARC

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505 8 |a This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin 
650 7 |a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics  |2 bisacsh 
650 7 |a TECHNOLOGY & ENGINEERING / Electronics / Digital  |2 bisacsh 
650 7 |a Acoustic surface wave devices  |2 fast 
650 7 |a Electric resonators  |2 fast 
650 4 |a Acoustic surface wave devices  |a Electric resonators 
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Datensatz im Suchindex

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author Campanella, Humberto
author_facet Campanella, Humberto
author_role aut
author_sort Campanella, Humberto
author_variant h c hc
building Verbundindex
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ZN 3700
collection ZDB-4-ENC
contents This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin
ctrlnum (ZDB-4-ENC)ocn659579814
(OCoLC)659579814
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dewey-full 621.381
dewey-hundreds 600 - Technology (Applied sciences)
dewey-ones 621 - Applied physics
dewey-raw 621.381
dewey-search 621.381
dewey-sort 3621.381
dewey-tens 620 - Engineering and allied operations
discipline Elektrotechnik / Elektronik / Nachrichtentechnik
format Electronic
eBook
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spelling Campanella, Humberto Verfasser aut
Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators Humberto Campanella
Acoustic wave & electromechanical resonators
Norwood, MA. Artech House 2010
1 online resource (xv, 345 pages) illustrations
txt rdacontent
c rdamedia
cr rdacarrier
Artech House integrated microsystems series
Print version record
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh
TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh
Acoustic surface wave devices fast
Electric resonators fast
Acoustic surface wave devices Electric resonators
Erscheint auch als Druck-Ausgabe Campanella, Humberto Acoustic wave and electromechanical resonators Norwood, MA. : Artech House, 2010 9781607839774
spellingShingle Campanella, Humberto
Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh
TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh
Acoustic surface wave devices fast
Electric resonators fast
Acoustic surface wave devices Electric resonators
title Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators
title_alt Acoustic wave & electromechanical resonators
title_auth Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators
title_exact_search Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators
title_full Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators Humberto Campanella
title_fullStr Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators Humberto Campanella
title_full_unstemmed Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators Humberto Campanella
title_short Acoustic wave and electromechanical resonators
title_sort acoustic wave and electromechanical resonators concept to key applications acoustic wave electromechanical resonators
title_sub concept to key applications = Acoustic wave & electromechanical resonators
topic TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh
TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh
Acoustic surface wave devices fast
Electric resonators fast
Acoustic surface wave devices Electric resonators
topic_facet TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
TECHNOLOGY & ENGINEERING / Electronics / Digital
Acoustic surface wave devices
Electric resonators
Acoustic surface wave devices Electric resonators
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AT campanellahumberto acousticwaveelectromechanicalresonators