Low temperature epitaxial growth of semiconductors

Low temperature processes for semiconductors have been recently under intensive development to fabricate controlled device structures with minute dimensions in order to achieve the highest device performance and new device functions as well as high integration density. Comprising reviews by experts...

Ausführliche Beschreibung

Bibliographische Detailangaben

Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Singapore World Scientific Pub. Co. c1991
Schlagworte:	Compound semiconductors Epitaxy Crystal growth Low temperatures Epitaxie Halbleiterbauelement Halbleiter
Online-Zugang:	FHN01 URL des Erstveroeffentlichers
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