Developments in surface contamination and cleaning, Volume 8 cleaning techniques

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...

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Bibliographische Detailangaben

Weitere Verfasser:	Kohli, Rajiv (HerausgeberIn), Mittal, K. L. (HerausgeberIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Oxford, England Waltham, Massachusetts William Andrew 2015
Schlagworte:	Cleaning Coatings Particles > Measurement Surface contamination > Prevention Surfaces (Technology) > Inspection
Online-Zugang:	FAW01 URL des Erstveröffentlichers
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