Physics of radio-frequency plasmas
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics,...
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cambridge
Cambridge University Press
2011
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| Schlagworte: | |
| Online-Zugang: | DE-12 DE-92 URL des Erstveröffentlichers |
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