Trace analysis of specialty and electronic gases
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Hoboken
Wiley
©2013
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| Online-Zugang: | DE-861 DE-473 URL des Erstveröffentlichers |
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| Beschreibung: | Appendix A: Cylinder and Specialized Fittings Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique Includes bibliographical references and index |
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| Beschreibung: | 1 Online-Ressource (xxxv, 349 pages) |
| ISBN: | 9781118642771 1118642775 9781118642566 1118642562 9781299804647 1299804640 9781118642573 1118642570 9781118065662 1118065662 |