Dielectric films for advanced microelectronics
Gespeichert in:
| Format: | Elektronisch E-Book |
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| Sprache: | English |
| Veröffentlicht: |
Chichester, England
John Wiley & Sons
©2007
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| Schriftenreihe: | Wiley series in materials for electronic and optoelectronic applications
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| Schlagworte: | |
| Online-Zugang: | DE-861 DE-473 URL des Erstveröffentlichers |
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| Beschreibung: | Includes bibliographical references and index The topic of thin films is an area of increasing¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices |
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| Beschreibung: | 1 Online-Ressource (xxii, 486 pages) |
| ISBN: | 9780470017944 0470017945 9780470065419 0470065419 |