Superconducting multilayer technology for Josephson devices
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| Format: | Abschlussarbeit Buch |
| Sprache: | English |
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Karlsruhe
KIT Scientific Publ.
2013
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| Schriftenreihe: | Karlsruher Schriftenreihe zur Supraleitung
013 |
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| 245 | 1 | 0 | |a Superconducting multilayer technology for Josephson devices |c by Johannes Maximilian Meckbach |
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| 650 | 0 | 7 | |a Niobnitride |0 (DE-588)4348978-3 |2 gnd |9 rswk-swf |
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| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |a Meckbach, Johannes Maximilian |t Superconducting Multilayer Technology for Josephson Devices |
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Datensatz im Suchindex
| _version_ | 1806329741760790528 |
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| adam_text |
CONTENTS
PREFACE I
DANKSAGUNG III
KURZFASSUNG VII
1 INTRODUCTION AND MOTIVATION 1
2 SUPERCONDUCTIVITY AND JOSEPHSON EFFECTS 5
2.1 FUNDAMENTALS OF SUPERCONDUCTIVITY 5
2.2 SHORT JOSEPHSON JUNCTIONS 8
2.3 LONG JOSEPHSON JUNCTIONS 18
2.4 JOSEPHSON JUNCTION DEVICES 25
2.4.1 SUPERCONDUCTING QUANTUM INTERFERENCE DEVICES 26
2.4.2 FRACTIONAL VORTEX DEVICES 29
2.4.3 JOSEPHSON OSCILLATORS 32
2.4.4 REQUIREMENTS FOR FUTURE JOSEPHSON DEVICES 35
3 JOSEPHSON JUNCTIONS BASED ON TRILAYERS OF NIOBIUM AND ALUMINUM
OXIDE 39
3.1 CONVENTIONAL FABRICATION PROCESS 39
3.2 PLANAR FABRICATION PROCESSES 44
3.3 EXTRACTION OF QUALITY PARAMETERS 52
3.3.1 MEASUREMENT SETUP 52
3.3.2 CHARACTERIZATION OF SHORT JOSEPHSON JUNCTIONS 53
3.3.3 CHARACTERIZATION OF LONG JOSEPHSON JUNCTIONS 59
3.4 INVESTIGATED JOSEPHSON JUNCTION DEVICES 64
3.4.1 ENHANCED SUPERCONDUCTING QUANTUM INTERFERENCE DEVICES 64
3.4.2 FRACTIONAL JOSEPHSON VORTEX DEVICES 73
3.4.3 RESONANT ACTIVATION OF FRACTIONAL VORTICES 78
3.4.4 LINEAR VORTEX MOLECULES 83
3.4.5 IMPROVED FLUX-HOW OSCILLATORS '91
XIII
HTTP://D-NB.INFO/1045751308
4 NIOBIUM NITRIDE AND ALUMINUM NITRIDE MULTILAYERS FOR JOSEPHSON
DEVICES 99
4.1 MULTI-CHAMBER SPUTTER SYSTEM 100
4.2 OPTIMIZATION OF NIOBIUM NITRIDE FILMS 102
4.3 INTEGRATION OF ALUMINUM NITRIDE FILMS FOR NIOBIUM NITRIDE DEVICES
. 114
4.4 ALL-NIOBIUM NITRIDE JOSEPHSON JUNCTIONS 121
5 SUMMARY 129
A APPENDIX 133
A.L PHOTO LITHOGRAPHY 133
A.2 ETCHING AND DEPOSITION 133
LIST OF FIGURES 137
LIST OF TABLES 141
NOMENCLATURE 143
BIBLIOGRAPHY 151
OWN PUBLICATIONS 169
SUPERVISED STUDENT THESES 171
INTERNATIONAL CONFERENCES
173 |
| any_adam_object | 1 |
| author | Meckbach, Johannes Maximilian |
| author_GND | (DE-588)1046197150 |
| author_facet | Meckbach, Johannes Maximilian |
| author_role | aut |
| author_sort | Meckbach, Johannes Maximilian |
| author_variant | j m m jm jmm |
| building | Verbundindex |
| bvnumber | BV042200218 |
| classification_rvk | ZN 5220 |
| ctrlnum | (OCoLC)870196934 (DE-599)DNB1045751308 |
| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV042200218 |
| illustrated | Illustrated |
| indexdate | 2024-08-03T01:58:00Z |
| institution | BVB |
| isbn | 9783731501220 3731501228 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027639126 |
| oclc_num | 870196934 |
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| owner | DE-83 |
| owner_facet | DE-83 |
| physical | XIII, 175 S. Ill., graph. Darst. 24 cm, 440 g |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | KIT Scientific Publ. |
| record_format | marc |
| series | Karlsruher Schriftenreihe zur Supraleitung |
| series2 | Karlsruher Schriftenreihe zur Supraleitung |
| spelling | Meckbach, Johannes Maximilian Verfasser (DE-588)1046197150 aut Superconducting multilayer technology for Josephson devices by Johannes Maximilian Meckbach Karlsruhe KIT Scientific Publ. 2013 XIII, 175 S. Ill., graph. Darst. 24 cm, 440 g txt rdacontent n rdamedia nc rdacarrier Karlsruher Schriftenreihe zur Supraleitung 013 Zugl.: Karlsruhe, Karlsruher Inst. für Technologie, Diss., 2013 Josephson-Kontakt (DE-588)4162777-5 gnd rswk-swf Aluminiumnitrid (DE-588)4226770-5 gnd rswk-swf Supraleitendes Bauelement (DE-588)4184138-4 gnd rswk-swf Herstellung (DE-588)4159653-5 gnd rswk-swf Niobnitride (DE-588)4348978-3 gnd rswk-swf Mehrschichtsystem (DE-588)4244347-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Josephson-Kontakt (DE-588)4162777-5 s Niobnitride (DE-588)4348978-3 s Aluminiumnitrid (DE-588)4226770-5 s Mehrschichtsystem (DE-588)4244347-7 s Supraleitendes Bauelement (DE-588)4184138-4 s Herstellung (DE-588)4159653-5 s DE-604 Erscheint auch als Online-Ausgabe Meckbach, Johannes Maximilian Superconducting Multilayer Technology for Josephson Devices Karlsruher Schriftenreihe zur Supraleitung 013 (DE-604)BV042200222 013 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4554343&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027639126&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Meckbach, Johannes Maximilian Superconducting multilayer technology for Josephson devices Karlsruher Schriftenreihe zur Supraleitung Josephson-Kontakt (DE-588)4162777-5 gnd Aluminiumnitrid (DE-588)4226770-5 gnd Supraleitendes Bauelement (DE-588)4184138-4 gnd Herstellung (DE-588)4159653-5 gnd Niobnitride (DE-588)4348978-3 gnd Mehrschichtsystem (DE-588)4244347-7 gnd |
| subject_GND | (DE-588)4162777-5 (DE-588)4226770-5 (DE-588)4184138-4 (DE-588)4159653-5 (DE-588)4348978-3 (DE-588)4244347-7 (DE-588)4113937-9 |
| title | Superconducting multilayer technology for Josephson devices |
| title_auth | Superconducting multilayer technology for Josephson devices |
| title_exact_search | Superconducting multilayer technology for Josephson devices |
| title_full | Superconducting multilayer technology for Josephson devices by Johannes Maximilian Meckbach |
| title_fullStr | Superconducting multilayer technology for Josephson devices by Johannes Maximilian Meckbach |
| title_full_unstemmed | Superconducting multilayer technology for Josephson devices by Johannes Maximilian Meckbach |
| title_short | Superconducting multilayer technology for Josephson devices |
| title_sort | superconducting multilayer technology for josephson devices |
| topic | Josephson-Kontakt (DE-588)4162777-5 gnd Aluminiumnitrid (DE-588)4226770-5 gnd Supraleitendes Bauelement (DE-588)4184138-4 gnd Herstellung (DE-588)4159653-5 gnd Niobnitride (DE-588)4348978-3 gnd Mehrschichtsystem (DE-588)4244347-7 gnd |
| topic_facet | Josephson-Kontakt Aluminiumnitrid Supraleitendes Bauelement Herstellung Niobnitride Mehrschichtsystem Hochschulschrift |
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| volume_link | (DE-604)BV042200222 |
| work_keys_str_mv | AT meckbachjohannesmaximilian superconductingmultilayertechnologyforjosephsondevices |