Femtosecond laser 3D micromachining for microfluidic and optofluidic applications
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| Hauptverfasser: | , |
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| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
London [u.a.]
Springer
2014
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| Schriftenreihe: | Springer briefs in applied sciences and technology
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| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV041255346 | ||
| 003 | DE-604 | ||
| 005 | 20140814 | ||
| 007 | t | ||
| 008 | 130904s2014 ad|| |||| 00||| eng d | ||
| 020 | |a 9781447155409 |9 978-1-4471-5540-9 | ||
| 035 | |a (OCoLC)864555688 | ||
| 035 | |a (DE-599)BVBBV041255346 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-1043 |a DE-M347 | ||
| 082 | 0 | |a 620.5 |2 23 | |
| 084 | |a UH 5618 |0 (DE-625)145670: |2 rvk | ||
| 100 | 1 | |a Sugioka, Koji |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Femtosecond laser 3D micromachining for microfluidic and optofluidic applications |c Koji Sugioka ; Ya Cheng |
| 264 | 1 | |a London [u.a.] |b Springer |c 2014 | |
| 300 | |a IX, 129 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Springer briefs in applied sciences and technology | |
| 650 | 0 | 7 | |a Femtosekundenlaser |0 (DE-588)4273256-6 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Femtosekundenlaser |0 (DE-588)4273256-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Cheng, Ya |e Verfasser |4 aut | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |z 978-1-4471-5541-6 |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026229301&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-026229301 | ||
Datensatz im Suchindex
| _version_ | 1804150712505991168 |
|---|---|
| adam_text | Contents
1
Introduction
........................................ 1
References
......................................... 4
2
Current Techniques for Fabricating Microfluidic
and Optofluidic Devices
............................... 7
2.1
Introduction
.................................... 7
2.2
Glass Etching
................................... 9
2.3
PDMS-Based Soft Lithography
...................... 10
2.4
Femtosecond-Laser-Induced Two-Photon Polymerization
.... 12
2.5
Femtosecond Laser Direct Writing in Glass
.............. 14
2.6
Summary
...................................... 15
References
......................................... 16
3
Fundamentals of Femtosecond Laser Processing
............. 19
3.1
Introduction
.................................... 19
3.2
Principles and Characteristics of Femtosecond
Laser Processing
................................. 20
3.2.1
Nonthermal Processing
....................... 20
3.2.2
Minimized Heat-Affected Zone
................. 21
3.2.3
Nonlinear Absorption (Photoionization)
........... 21
3.2.4
Internal Modification of Glass
.................. 23
3.2.5
Enhanced Spatial Resolution
................... 24
3.3
Interaction of Femtosecond Laser Radiation with Glass
..... 25
3.4
State-of-the-Art Femtosecond Laser Processing
........... 26
3.5
Summary
...................................... 30
References
......................................... 30
4
Fabrication of Microfluidic Structures in Glass
.............. 35
4.1
Introduction
.................................... 35
4.2
Femtosecond-Laser-Assisted Wet Chemical Etching
........ 36
4.2.1
Fabrication in Photosensitive Glass
.............. 36
4.2.2
Fabrication in Fused Silica
.................... 38
4.3
Liquid-Assisted Femtosecond Laser
Three-Dimensional Drilling
......................... 41
vu
viii Contents
4.4
Shaping Techniques for Fabricating Microfluidic Channels
... 44
4.5
Summary
...................................... 46
References
......................................... 47
5
Fabrication of Fluid Control
Microdevices................. 49
5.1
Introduction
.................................... 49
5.2
Microvalve
Fabrication
............................ 50
5.3 Microrotor
Fabrication
............................ 52
5.4
Summary
...................................... 54
References
......................................... 55
6
Fabrication of Micro-optical Components in Glass
........... 57
6.1
Introduction
.................................... 57
6.2
Optical Waveguides
.............................. 58
6.3
Micro-optical Mirrors
............................. 60
6.4
Micro-optical Lenses
.............................. 64
6.5
Micro-optical Cavities
............................. 65
6.6
Micro-optical Attenuators
.......................... 69
6.7
Summary
...................................... 71
References
......................................... 71
7
Selective Metallization of Glass
.......................... 75
7.1
Introduction
.................................... 75
7.2
Femtosecond-Laser-Assisted Electroless Plating
........... 76
7.3
Femtosecond Laser Modification Combined
with Electroless Plating
............................ 78
7.3.1
Modification Using Silver Nitrate
................ 79
7.3.2
Modification by Ablation
..................... 81
7.4
Fabrication of Three-Dimensional Metal
Microstructures
..... 83
7.5
Summary
...................................... 86
References
......................................... 86
8
Integration of Microcomponents
......................... 89
8.1
Introduction
.................................... 89
8.2
Integration of Free-Space Micro-optical Components
and Optical Waveguides
........................... 90
8.3
Microfluidic Dye Laser
............................ 91
8.4
Mach-Zehnder Optical Modulator
.................... 95
8.5
Optofluidic Systems
..............................
97
8.6
Summary
......................................
References
.........................................
9
Applications of
Biochips
Fabricated by Femtosecond Lasers
....
Ю5
9.1
Introduction
....................................
^
Contents ix
9.2 Biosensing Based
on Surface-Enhanced Raman
Scattering Spectroscopy
............................ 106
9.3
Huid
Mixing
................................... 107
9.4
Single Cell Detection
............................. 108
9.5
Manipulation of Single Cells
........................ 110
9.6
Cell Sorting
....................................
Ill
9.7
Concentration Analysis of Liquid Samples
.............. 113
9.8
Rapid Screening of Algae Populations
................. 116
9.9
Nanoaquariums for Determining the Functions
of Microorganisms
............................... 117
9.10
Summary
...................................... 121
References
......................................... 122
10
Summary and Outlook
................................ 125
10.1
Introduction
.................................... 125
10.2
Summary
...................................... 126
10.3
Outlook
....................................... 126
References
......................................... 128
|
| any_adam_object | 1 |
| author | Sugioka, Koji Cheng, Ya |
| author_facet | Sugioka, Koji Cheng, Ya |
| author_role | aut aut |
| author_sort | Sugioka, Koji |
| author_variant | k s ks y c yc |
| building | Verbundindex |
| bvnumber | BV041255346 |
| classification_rvk | UH 5618 |
| ctrlnum | (OCoLC)864555688 (DE-599)BVBBV041255346 |
| dewey-full | 620.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01471nam a2200361 c 4500</leader><controlfield tag="001">BV041255346</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20140814 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">130904s2014 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781447155409</subfield><subfield code="9">978-1-4471-5540-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)864555688</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV041255346</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-1043</subfield><subfield code="a">DE-M347</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.5</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 5618</subfield><subfield code="0">(DE-625)145670:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Sugioka, Koji</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Femtosecond laser 3D micromachining for microfluidic and optofluidic applications</subfield><subfield code="c">Koji Sugioka ; Ya Cheng</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">London [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2014</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IX, 129 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Springer briefs in applied sciences and technology</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Femtosekundenlaser</subfield><subfield code="0">(DE-588)4273256-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Femtosekundenlaser</subfield><subfield code="0">(DE-588)4273256-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cheng, Ya</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="z">978-1-4471-5541-6</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026229301&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-026229301</subfield></datafield></record></collection> |
| id | DE-604.BV041255346 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:43:17Z |
| institution | BVB |
| isbn | 9781447155409 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026229301 |
| oclc_num | 864555688 |
| open_access_boolean | |
| owner | DE-703 DE-1043 DE-M347 |
| owner_facet | DE-703 DE-1043 DE-M347 |
| physical | IX, 129 S. Ill., graph. Darst. |
| publishDate | 2014 |
| publishDateSearch | 2014 |
| publishDateSort | 2014 |
| publisher | Springer |
| record_format | marc |
| series2 | Springer briefs in applied sciences and technology |
| spelling | Sugioka, Koji Verfasser aut Femtosecond laser 3D micromachining for microfluidic and optofluidic applications Koji Sugioka ; Ya Cheng London [u.a.] Springer 2014 IX, 129 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer briefs in applied sciences and technology Femtosekundenlaser (DE-588)4273256-6 gnd rswk-swf Femtosekundenlaser (DE-588)4273256-6 s DE-604 Cheng, Ya Verfasser aut Erscheint auch als Online-Ausgabe 978-1-4471-5541-6 Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026229301&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Sugioka, Koji Cheng, Ya Femtosecond laser 3D micromachining for microfluidic and optofluidic applications Femtosekundenlaser (DE-588)4273256-6 gnd |
| subject_GND | (DE-588)4273256-6 |
| title | Femtosecond laser 3D micromachining for microfluidic and optofluidic applications |
| title_auth | Femtosecond laser 3D micromachining for microfluidic and optofluidic applications |
| title_exact_search | Femtosecond laser 3D micromachining for microfluidic and optofluidic applications |
| title_full | Femtosecond laser 3D micromachining for microfluidic and optofluidic applications Koji Sugioka ; Ya Cheng |
| title_fullStr | Femtosecond laser 3D micromachining for microfluidic and optofluidic applications Koji Sugioka ; Ya Cheng |
| title_full_unstemmed | Femtosecond laser 3D micromachining for microfluidic and optofluidic applications Koji Sugioka ; Ya Cheng |
| title_short | Femtosecond laser 3D micromachining for microfluidic and optofluidic applications |
| title_sort | femtosecond laser 3d micromachining for microfluidic and optofluidic applications |
| topic | Femtosekundenlaser (DE-588)4273256-6 gnd |
| topic_facet | Femtosekundenlaser |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026229301&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT sugiokakoji femtosecondlaser3dmicromachiningformicrofluidicandoptofluidicapplications AT chengya femtosecondlaser3dmicromachiningformicrofluidicandoptofluidicapplications |