Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany
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| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
c2007
|
| Schriftenreihe: | Proceedings of SPIE
6617 |
| Schlagworte: | |
| Online-Zugang: | Table of contents |
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MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV039618993 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t| | ||
| 008 | 111006s2007 xxua||| |||| 10||| eng d | ||
| 010 | |a 2007281789 | ||
| 020 | |a 9780819467591 |9 978-0-8194-6759-1 | ||
| 035 | |a (OCoLC)255475935 | ||
| 035 | |a (DE-599)BVBBV039618993 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
| 049 | |a DE-29T | ||
| 050 | 0 | |a QC367 | |
| 082 | 0 | |a 681/.25 | |
| 245 | 1 | 0 | |a Modeling aspects in optical metrology |b 18 - 19 June 2007, Munich, Germany |c Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c c2007 | |
| 300 | |a Getr. Zählung |b ill. |c 28 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE |v 6617 | |
| 500 | |a Includes bibliographical references and author index | ||
| 650 | 4 | |a Optical measurements |v Congresses | |
| 650 | 4 | |a Integrated circuits |v Congresses | |
| 650 | 4 | |a Semiconductors |x Design and construction |v Congresses | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Bosse, Harald |e Sonstige |4 oth | |
| 830 | 0 | |a Proceedings of SPIE |v 6617 |w (DE-604)BV017065952 |9 6617 | |
| 856 | 4 | |u http://www.loc.gov/catdir/toc/fy0802/2007281789.html |3 Table of contents | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-024469446 | |
Datensatz im Suchindex
| _version_ | 1819286638977613825 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV039618993 |
| callnumber-first | Q - Science |
| callnumber-label | QC367 |
| callnumber-raw | QC367 |
| callnumber-search | QC367 |
| callnumber-sort | QC 3367 |
| callnumber-subject | QC - Physics |
| ctrlnum | (OCoLC)255475935 (DE-599)BVBBV039618993 |
| dewey-full | 681/.25 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681/.25 |
| dewey-search | 681/.25 |
| dewey-sort | 3681 225 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01545nam a2200397zcb4500</leader><controlfield tag="001">BV039618993</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t|</controlfield><controlfield tag="008">111006s2007 xxua||| |||| 10||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2007281789</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780819467591</subfield><subfield code="9">978-0-8194-6759-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)255475935</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV039618993</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxu</subfield><subfield code="c">US</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC367</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">681/.25</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Modeling aspects in optical metrology</subfield><subfield code="b">18 - 19 June 2007, Munich, Germany</subfield><subfield code="c">Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash.</subfield><subfield code="b">SPIE</subfield><subfield code="c">c2007</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Getr. Zählung</subfield><subfield code="b">ill.</subfield><subfield code="c">28 cm</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Proceedings of SPIE</subfield><subfield code="v">6617</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and author index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical measurements</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bosse, Harald</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Proceedings of SPIE</subfield><subfield code="v">6617</subfield><subfield code="w">(DE-604)BV017065952</subfield><subfield code="9">6617</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://www.loc.gov/catdir/toc/fy0802/2007281789.html</subfield><subfield code="3">Table of contents</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024469446</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV039618993 |
| illustrated | Illustrated |
| indexdate | 2024-12-24T02:22:21Z |
| institution | BVB |
| isbn | 9780819467591 |
| language | English |
| lccn | 2007281789 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024469446 |
| oclc_num | 255475935 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | Getr. Zählung ill. 28 cm |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | SPIE |
| record_format | marc |
| series | Proceedings of SPIE |
| series2 | Proceedings of SPIE |
| spelling | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) Bellingham, Wash. SPIE c2007 Getr. Zählung ill. 28 cm txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE 6617 Includes bibliographical references and author index Optical measurements Congresses Integrated circuits Congresses Semiconductors Design and construction Congresses (DE-588)1071861417 Konferenzschrift gnd-content Bosse, Harald Sonstige oth Proceedings of SPIE 6617 (DE-604)BV017065952 6617 http://www.loc.gov/catdir/toc/fy0802/2007281789.html Table of contents |
| spellingShingle | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Proceedings of SPIE Optical measurements Congresses Integrated circuits Congresses Semiconductors Design and construction Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany |
| title_auth | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany |
| title_exact_search | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany |
| title_full | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) |
| title_fullStr | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) |
| title_full_unstemmed | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) |
| title_short | Modeling aspects in optical metrology |
| title_sort | modeling aspects in optical metrology 18 19 june 2007 munich germany |
| title_sub | 18 - 19 June 2007, Munich, Germany |
| topic | Optical measurements Congresses Integrated circuits Congresses Semiconductors Design and construction Congresses |
| topic_facet | Optical measurements Congresses Integrated circuits Congresses Semiconductors Design and construction Congresses Konferenzschrift |
| url | http://www.loc.gov/catdir/toc/fy0802/2007281789.html |
| volume_link | (DE-604)BV017065952 |
| work_keys_str_mv | AT bosseharald modelingaspectsinopticalmetrology1819june2007munichgermany |