MEMS a practical guide to design, analysis, and applications

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Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: Berlin <<[u.a.]>> Springer <<[u.a.]>> 2006
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LEADER 00000nam a2200000zc 4500
001 BV036594966
003 DE-604
005 00000000000000.0
007 cr|uuu---uuuuu
008 100802s2006 xx ad|| o|||| 00||| eng d
015 |a 06,A26,0817  |2 dnb 
020 |a 0815514972  |9 0-8155-1497-2 
020 |a 3540211179  |9 3-540-21117-9 
020 |a 9783540336556  |c Online  |9 978-3-540-33655-6 
024 7 |a 10.1007/978-3-540-33655-6  |2 doi 
024 3 |a 9783540211174 
035 |a (OCoLC)249321430 
035 |a (DE-599)BVBBV036594966 
040 |a DE-604  |b ger 
041 0 |a eng 
049 |a DE-898  |a DE-634 
082 0 |a 621 
084 |a ZN 3750  |0 (DE-625)157334:  |2 rvk 
245 1 0 |a MEMS  |b a practical guide to design, analysis, and applications  |c ed. by Jan G. Korvink ... 
246 1 3 |a Micro-electro-mechanical systems 
264 1 |a Berlin <<[u.a.]>>  |b Springer <<[u.a.]>>  |c 2006 
300 |a 1 Online-Ressource (XXV, 965 S.)  |b Ill., graph. Darst. 
336 |b txt  |2 rdacontent 
337 |b c  |2 rdamedia 
338 |b cr  |2 rdacarrier 
500 |a Literaturangaben 
650 0 7 |a MEMS  |0 (DE-588)4824724-8  |2 gnd  |9 rswk-swf 
689 0 0 |a MEMS  |0 (DE-588)4824724-8  |D s 
689 0 |5 DE-604 
700 1 |a Korvink, Jan G.  |e Sonstige  |4 oth 
856 4 0 |u https://doi.org/10.1007/978-3-540-33655-6  |x Verlag  |3 Volltext 
912 |a ZDB-2-ENG 
943 1 |a oai:aleph.bib-bvb.de:BVB01-020515598 
966 e |u https://doi.org/10.1007/978-3-540-33655-6  |l DE-634  |p ZDB-2-ENG  |x Verlag  |3 Volltext 
966 e |u https://doi.org/10.1007/978-3-540-33655-6  |l DE-898  |p ZDB-2-ENG  |x Verlag  |3 Volltext 

Datensatz im Suchindex

_version_ 1819278224393240577
any_adam_object
building Verbundindex
bvnumber BV036594966
classification_rvk ZN 3750
collection ZDB-2-ENG
ctrlnum (OCoLC)249321430
(DE-599)BVBBV036594966
dewey-full 621
dewey-hundreds 600 - Technology (Applied sciences)
dewey-ones 621 - Applied physics
dewey-raw 621
dewey-search 621
dewey-sort 3621
dewey-tens 620 - Engineering and allied operations
discipline Elektrotechnik / Elektronik / Nachrichtentechnik
doi_str_mv 10.1007/978-3-540-33655-6
format Electronic
eBook
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01568nam a2200445zc 4500</leader><controlfield tag="001">BV036594966</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">100802s2006 xx ad|| o|||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">06,A26,0817</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815514972</subfield><subfield code="9">0-8155-1497-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3540211179</subfield><subfield code="9">3-540-21117-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783540336556</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-540-33655-6</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-540-33655-6</subfield><subfield code="2">doi</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783540211174</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)249321430</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV036594966</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-898</subfield><subfield code="a">DE-634</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">MEMS</subfield><subfield code="b">a practical guide to design, analysis, and applications</subfield><subfield code="c">ed. by Jan G. Korvink ...</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Micro-electro-mechanical systems</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin &lt;&lt;[u.a.]&gt;&gt;</subfield><subfield code="b">Springer &lt;&lt;[u.a.]&gt;&gt;</subfield><subfield code="c">2006</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XXV, 965 S.)</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Korvink, Jan G.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-540-33655-6</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-020515598</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-540-33655-6</subfield><subfield code="l">DE-634</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-540-33655-6</subfield><subfield code="l">DE-898</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection>
id DE-604.BV036594966
illustrated Illustrated
indexdate 2024-12-24T00:08:36Z
institution BVB
isbn 0815514972
3540211179
9783540336556
language English
oai_aleph_id oai:aleph.bib-bvb.de:BVB01-020515598
oclc_num 249321430
open_access_boolean
owner DE-898
DE-BY-UBR
DE-634
owner_facet DE-898
DE-BY-UBR
DE-634
physical 1 Online-Ressource (XXV, 965 S.) Ill., graph. Darst.
psigel ZDB-2-ENG
publishDate 2006
publishDateSearch 2006
publishDateSort 2006
publisher Springer <<[u.a.]>>
record_format marc
spelling MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink ...
Micro-electro-mechanical systems
Berlin <<[u.a.]>> Springer <<[u.a.]>> 2006
1 Online-Ressource (XXV, 965 S.) Ill., graph. Darst.
txt rdacontent
c rdamedia
cr rdacarrier
Literaturangaben
MEMS (DE-588)4824724-8 gnd rswk-swf
MEMS (DE-588)4824724-8 s
DE-604
Korvink, Jan G. Sonstige oth
https://doi.org/10.1007/978-3-540-33655-6 Verlag Volltext
spellingShingle MEMS a practical guide to design, analysis, and applications
MEMS (DE-588)4824724-8 gnd
subject_GND (DE-588)4824724-8
title MEMS a practical guide to design, analysis, and applications
title_alt Micro-electro-mechanical systems
title_auth MEMS a practical guide to design, analysis, and applications
title_exact_search MEMS a practical guide to design, analysis, and applications
title_full MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink ...
title_fullStr MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink ...
title_full_unstemmed MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink ...
title_short MEMS
title_sort mems a practical guide to design analysis and applications
title_sub a practical guide to design, analysis, and applications
topic MEMS (DE-588)4824724-8 gnd
topic_facet MEMS
url https://doi.org/10.1007/978-3-540-33655-6
work_keys_str_mv AT korvinkjang memsapracticalguidetodesignanalysisandapplications
AT korvinkjang microelectromechanicalsystems