Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces
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| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2009
|
| Schriftenreihe: | Berichte aus der Mikro- und Feinwerktechnik
23 |
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| Online-Zugang: | Inhaltsverzeichnis |
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| 100 | 1 | |a Lucas, Nina |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces |c Nina Lucas |
| 264 | 1 | |a Aachen |b Shaker |c 2009 | |
| 300 | |a X, 166 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 1 | |a Berichte aus der Mikro- und Feinwerktechnik |v 23 | |
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Datensatz im Suchindex
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| adam_text | CONTENT CONTENT CONTENT I ACRONYMS V LIST OF SYMBOLS VII 1 INTRODUCTION
1 2 THEORETICAL BACKGROUND 5 2.1 BASIC TERMS AND CHARACTERISTICS OF
PLASMAS 5 2.1.1 THE DEBYE SCREENING LENGTH XD 7 2.1.2 THE MEAN FREE PATH
X AND THE COLLISION CROSS SECTION O 8 2.2 THE ELECTRICAL BREAKDOWN
MECHANISMS AND THE PASCHEN LAW 9 2.2.1 THE ELECTRICAL BREAKDOWN OF DC
DISCHARGES 9 2.2.2 THE PASCHEN LAW 11 2.2.3 THE ELECTRICAL BREAKDOWN AT
HIGH VOLTAGES WITH AC EXCITATION... 12 2.3 DIELECTRIC BARRIER DISCHARGES
13 2.3.1 FILAMENTARY DISCHARGES 14 2.3.2 HOMOGENEOUS OR DIFFUSE
DISCHARGES 16 2.4 PARTIAL DISCHARGES 17 2.4.1 THE GAS DISCHARGE PROCESS
IN DIELECTRIC VOIDS 18 2.4.2 INFLUENCE OF THE VOID GEOMETRY ON THE
SPATIAL DISTRIBUTION OF THE DISCHARGE 19 2.4.3 INCEPTION DELAY OF
PARTIAL DISCHARGES 21 2.4.4 CHARGE DECAY AND MEMORY EFFECT 22 2.5
ELECTRICAL TREEING 23 3 STATE OF THE ART 27 3.1 MICROCAVITY PLASMAS AT
ATMOSPHERIC PRESSURE 27 3.2 PLASMA MODIFICATION OF POLYMERS 31 4
MATERIALS AND PROCESSES 37 4.1 THE SU-8 PHOTORESIST 37 4.1.1 PROCESSING
OF SU-8 39 4.1.2 APPLICATION OF SU-8 FOR THE GENERATION OF MASTER
STRUCTURES 41 BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/993157238
DIGITALISIERT DURCH 7.2.1 AMINO-FUNCTIONALIZATION OF POLYMER SURFACES
123 CONTENT 4.2 POLYDIMETHYLSILOXANE 48 4.2.1 PROPERTIES 48 4.2.2
POLYMERIZATION 49 4.2.3 SOFT LITHOGRAPHY 50 4.2.4 BONDING TECHNOLOGIES
57 4.3 CONDUCTIVE THROUGH-HOLE INTERCONNECTIONS IN GLASS WAFERS 59 4.3.1
THE WET CHEMICAL GLASS ETCH PROCESS 59 4.3.2 GENERATION OF CONDUCTIVE
THROUGH-HOLE INTERCONNECTIONS VIA MICRO ELECTROPLATING 62 MICROPLASMA
STAMPS 65 5.1 THE HIGH-VOLTAGE DESIGN 66 5.1.1 CONCEPT 66 5.1.2
PROCESSING 67 5.2 THE LOW-VOLTAGE DESIGN 68 5.2.1 CONCEPT 68 5.2.2
PROCESSING 69 CHARACTERIZATION AND OPTIMIZATION OF MICROPLASMA STAMPS 71
6.1 EXPERIMENTAL SETUP 72 6.2 EXPERIMENTS AND SIMULATIONS 75 6.2.1
INFLUENCE OF THE MICROPLASMA STAMP DESIGNS 77 6.2.2 INFLUENCE OF THE
ELECTRODE DESIGN 79 6.2.3 INFLUENCE OF THE CAVITY DESIGN 81 6.2.4
INFLUENCE OF THE COMPRESSION FORCE 103 6.2.5 INFLUENCE OF THE PDMS
COMPOSITION 106 6.2.6 INFLUENCE OF THE SUBSTRATE TOBE TREATED 107 6.2.7
INFLUENCE OF THE PROCESS GAS 110 6.2.8 INFLUENCE OF THE IGNITION
CONDITIONS 111 6.2.9 TIME DELAY 115 6.3 SCALING-UP 115 APPLICATIONS 117
7.1 SURFACE MODIFICATION OF POLYPROPYLENE FOR THE ELECTROLESS DEPOSITION
OF NICKEL 117 7.1.1 THE ELECTROLESS NICKEL DEPOSITION PROCESS 118 7.1.2
RESULTS 120 7.2 AREA-SELECTIVE MODIFICATION OF POLYPROPYLENE SURFACES
FOR PEPTIDE SYNTHESES 122 CONTENT 7.2.2 PEPTIDE SYNTHESIS ON
AMINO-FUNCTIONALIZED POLYMERS 124 8 CONCLUSIONS AND OUTLOOK 127 9
REFERENCES 131 9.1 LIST OF OWN PUBLICATIONS 131 9.2 LIST OF REFERENCES
134 A. PROCESS FLOWS 153 B. MATERIAL DATA 163 C. CAVITY DIMENSIONS OF
THE PLASMA STAMP DESIGNS 164 D. TECHNICAL DATA 165
|
| any_adam_object | 1 |
| author | Lucas, Nina |
| author_facet | Lucas, Nina |
| author_role | aut |
| author_sort | Lucas, Nina |
| author_variant | n l nl |
| building | Verbundindex |
| bvnumber | BV035686112 |
| ctrlnum | (OCoLC)916486200 (DE-599)DNB993157238 |
| dewey-full | 620.440153044 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.440153044 |
| dewey-search | 620.440153044 |
| dewey-sort | 3620.440153044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen |
| format | Thesis Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV035686112 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:43:24Z |
| institution | BVB |
| isbn | 9783832280086 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017740288 |
| oclc_num | 916486200 |
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| owner_facet | DE-634 |
| physical | X, 166 S. Ill., graph. Darst. |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
| publisher | Shaker |
| record_format | marc |
| series | Berichte aus der Mikro- und Feinwerktechnik |
| series2 | Berichte aus der Mikro- und Feinwerktechnik |
| spelling | Lucas, Nina Verfasser aut Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces Nina Lucas Aachen Shaker 2009 X, 166 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Berichte aus der Mikro- und Feinwerktechnik 23 Zugl.: Braunschweig, Techn. Univ., Diss., 2008 Prägen (DE-588)4374657-3 gnd rswk-swf Mikroplasma (DE-588)7544606-6 gnd rswk-swf Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Oberflächenbehandlung (DE-588)4042908-8 s Prägen (DE-588)4374657-3 s Mikroplasma (DE-588)7544606-6 s DE-604 Berichte aus der Mikro- und Feinwerktechnik 23 (DE-604)BV012609056 23 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017740288&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Lucas, Nina Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces Berichte aus der Mikro- und Feinwerktechnik Prägen (DE-588)4374657-3 gnd Mikroplasma (DE-588)7544606-6 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd |
| subject_GND | (DE-588)4374657-3 (DE-588)7544606-6 (DE-588)4042908-8 (DE-588)4113937-9 |
| title | Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces |
| title_auth | Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces |
| title_exact_search | Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces |
| title_full | Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces Nina Lucas |
| title_fullStr | Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces Nina Lucas |
| title_full_unstemmed | Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces Nina Lucas |
| title_short | Microplasma stamps - an atmospheric pressure plasma source for the area selective modification of surfaces |
| title_sort | microplasma stamps an atmospheric pressure plasma source for the area selective modification of surfaces |
| topic | Prägen (DE-588)4374657-3 gnd Mikroplasma (DE-588)7544606-6 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd |
| topic_facet | Prägen Mikroplasma Oberflächenbehandlung Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017740288&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV012609056 |
| work_keys_str_mv | AT lucasnina microplasmastampsanatmosphericpressureplasmasourcefortheareaselectivemodificationofsurfaces |